A Semiconductor OEM is undergoing a major redesign to cost reduce the consumable set of their new and mature Etch Chamber Tools. The goal is to reduce the cost of ownership by 25% against the incumbent Polyimide material.

Design Requirements

• Plasma Etch Resistance

• High Purity Levels

• Dimensionally Stable

• Hit aggressive price targets

• High dimensional stability

• Consistent density levels

Piper Delivered

A near net molded blank of High Purity Torlon (Kyron™ 1511) that had superior density and polymer structure.  Proprietary molding and curing processes were utilized to enhance the etch resistance of the polymer.

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